Diameter | <Ø10mm | Ø10mm~Ø15mm | Ø15mm~Ø25mm | Ø25mm~Ø50mm | >Ø50mm |
Profile error(PV) | <1um | <1.5um | <3um | <10um | <25um |
Decenter | <2um | <2.5um | <5um | <8um | <15um |
Center thickness tolerance | <±5um | <±10um | <±20um |
Shape | <Ø(mm) | R值 | 张角 |
凹 | <3.4 | >1.8 | <145° |
凸 | >2.6 | >2 | <145° |